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Principles of Plasma Discharges and Materials Processing

ISBN: 9780471005773

Product: Book, Hardcover

May have wear from normal use.

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Timely, authoritative, pedagogically consistent-- a valuable professional resource and a superior didactic tool. Authored by two internationally respected pioneers in the field, this book offers a fully integrated, pedagogically consistent presentation of the fundamental physics and chemistry of partially ionized, chemically reactive, low-pressure plasmas and their roles in a wide range of plasma discharges and processes used in thin film processing applications--especially in the fabrication of integrated circuits. With many fully worked examples, practice exercises, and clear demonstrations of the relationship of plasma parameters to external control parameters and processing results, this book combines the best qualities of a student text and a professional resource.
  • In-depth coverage of the fundamentals of plasma physics and chemistry--includes separate chapters on atomic and molecular collisions
  • Applies basic theory to plasma discharges, including calculations of plasma parameters and scaling of plasma parameters with control parameters
  • Applies results to basic processing mechanisms and the effects of plasma parameters on those mechanisms
  • Uses numerous worked examples to demonstrate the relationships between control parameters, plasma parameters, and processing results
ISBN/UPC:

9780471005773

Product:

Book, Hardcover

Title:

Principles of Plasma Discharges and Materials Processing

Publisher:

Wiley-interscience

Pages:

600

Languages:

English

Specification:

9.6 x 6.5 x 1.3 inches, 3 pounds

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Acceptable:Fairly worn but fully readable and intact. Pages may include notes, highlighting, or minor water damage. Dust jacket, CDs, product codes, or other inclusions may be missing or expired.
Good:Shows signs of wear. Pages may include limited notes or highlighting. Dust jacket, CDs, product codes, or other inclusions may be missing or expired.
Very Good:Item has seen limited use and has minimal signs of wear. Pages are clean without markings. Dust jacket, CDs, product codes, or other inclusions may be missing or expired.
Like New:Shows little to no signs of wear. Spine has no signs of creasing. Pages are clean without markings. CDs, product codes, or other inclusions may be missing or expired.